History

Technical developments offered by CMP

The following tables summarize the history of CMP projects since 1981.

Distribution of circuits per techology in 2015

Since 1981, more than 580 customers from 70 countries have been served, about 7600 projects have been prototyped through about 1000 runs and 70 different technologies have been interfaced.

Here below some history data, firstly the history of CMP runs in the Year-1 and then history of CMP runs from 1981 to the Year-1.

History of CMP runs in the Year-1

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Foundry Technology Run Institution Educational Research Industrial Total circuits
Foundry Technology Run Inst. Edu Res Ind Total cir
ams 0.18µm CMOS High Voltage H18A6 A18V15_2 2 0 2 0 2
ams 0.18µm CMOS CA18A6 A18C15_2 1 0 1 0 1
ams 0.18µm CMOS High Voltage H18A6 A18V15_3 3 0 3 0 3
ams 0.18µm CMOS CA18A6 A18C15_3 1 0 0 1 1
ams 0.18µm CMOS CA18A6 A18C15_4 5 0 5 0 5
ams 0.18µm CMOS High Voltage H18A6 A18V15_4 1 0 1 0 1
ams 0.35µm CMOS C35B4C3 A35C15_1 3 2 1 0 3
ams 0.35µm CMOS C35B4C3 A35C15_2 11 4 4 6 14
ams 0.35µm CMOS-Opto C35B4O1 A35O15_2 2 0 2 0 2
ams 0.35µm CMOS C35B4C3 A35C15_3 8 0 4 4 8
ams 0.35µm CMOS C35B4C3 A35C15_4 6 2 2 3 7
ams 0.35µm CMOS-Opto C35B4O1 A35O15_4 3 0 1 2 3
ams 0.35µm SiGe BiCMOS S35D4M5 A35S15_1 4 0 2 0 2
ams 0.35µm CMOS RF C35B4M3 A35R15_1 2 0 2 0 2
ams 0.35µm CMOS RF C35B4M3 A35R15_2 3 1 2 0 3
ams 0.35µm SiGe BiCMOS S35D4M5 A35S15_3 2 0 2 0 2
ams 0.35µm SiGe BiCMOS S35D4M5 A35S15_4 1 0 0 2 2
ams 0.35µm SiGe BiCMOS S35D4M5 SA35S15_1 1 0 0 11 11
ams 0.35µm CMOS High Voltage H35B4D3 A35V15_1 3 1 1 1 3
ams 0.35µm CMOS High Voltage H35B4D3 A35V15_2 4 2 1 1 4
ams 0.35µm CMOS High Voltage H35B4D3 A35V15_4 3 0 2 2 4
MEMSCAP PiezoMUMPS M03Z15_2 1 0 1 0 1
STMicroelectronics 130nm HCMOS9GP S13C15_1 3 1 0 2 3
STMicroelectronics 130nm HCMOS9GP S13C15_2 2 1 0 1 2
STMicroelectronics 130nm HCMOS9GP S13C15_4 3 0 6 0 6
STMicroelectronics 130nm H9SOI-FEM S13I15_1 1 0 0 1 1
STMicroelectronics 130nm H9SOI-FEM S13I15_2 1 0 0 2 2
STMicroelectronics 130nm SiGe BiCMOS9MW S13S15_1 2 0 4 2 6
STMicroelectronics 130nm SiGe BiCMOS9MW S13S15_2 2 0 4 3 7
STMicroelectronics 130nm SiGe BiCMOS9MW S13S15_4 4 0 5 5 10
STMicroelectronics 130nm HCMOS9A S13V15_1 2 0 0 2 2
STMicroelectronics 28nm CMOS28FDSOI S28I15_1 14 3 19 0 22
STMicroelectronics 28nm CMOS28FDSOI S28I15_2 10 0 13 3 16
STMicroelectronics 28nm CMOS28FDSOI S28I15_4 14 5 15 3 23
STMicroelectronics 55nm BiCMOS055 S55S15_1 2 0 1 3 4
STMicroelectronics 55nm BiCMOS055 S55S15_2 4 0 5 4 9
STMicroelectronics 65nm CMOS065 S65C15_1 17 4 23 7 34
STMicroelectronics 65nm CMOS065 S65C15_2 10 1 16 1 18
STMicroelectronics 65nm CMOS065 S65C15_3 9 1 15 0 16
39 runs 28 165 72 265

History of CMP runs from 1981 to 2014

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34 years 20 foundries 70 technologies 15 types 952 runs
2014 ams H18A6 High Voltage 0.18 2
2014 ams C35B4C3-C35B4O1 CMOS 0.35 5
2014 ams C35B4M3 CMOS RF 0.35 2
2014 ams S35B4M3 SiGe BiCMOS 0.35 2
2014 ams H35B4D3 High Voltage 0.35 4
2014 MEMSCAP PiezoMUMPS MEMS N/A 1
2014 STMicroelectronics CMOS130 CMOS130 130nm 4
2014 STMicroelectronics HCMOS9-SOI CMOS SOI 130nm 1
2014 STMicroelectronics BiCMOS9MW SiGe BiCMOS 130nm 3
2014 STMicroelectronics HCMOS9A HV-CMOS HCMOS9A 130nm 1
2014 STMicroelectronics CMOS28FDSOI CMOS28FDSOI 28nm 3
2014 STMicroelectronics BiCMOS55 BiCMOS 55nm 2
2014 STMicroelectronics CMOS065 CMOS065 65nm 2
2013 ams H18A6 High Voltage 0.18 1
2013 ams C35B4C3-C35B4O1 CMOS 0.35 9
2013 ams C35B4M3 CMOS RF 0.35 2
2013 ams S35B4M3 SiGe BiCMOS 0.35 4
2013 ams H35B4D3 High Voltage 0.35 3
2013 ams CYE CMOS 0.8 1
2013 TRIQUINT pHEMT GaAs pHEMT GaAs TQP15 150nm 1
2013 MEMSCAP PolyMUMPS MEMS N/A 1
2013 MEMSCAP SOIMUMPS MEMS N/A 2
2013 STMicroelectronics CMOS130 CMOS130 130nm 4
2013 STMicroelectronics HCMOS9-SOI CMOS SOI 130nm 4
2013 STMicroelectronics BiCMOS9MW SiGe BiCMOS 130nm 4
2013 STMicroelectronics HCMOS9A HCMOS9A 130nm 1
2013 STMicroelectronics CMOS028LP CMOS028 28nm 2
2013 STMicroelectronics CMOS28FDSOI CMOS28FDSOI 28nm 3
2013 STMicroelectronics BICMOS55 BiCMOS 55nm 2
2013 STMicroelectronics CMOS065 CMOS065 65nm 4
2012 ams C35B4C3-C35B4O1 CMOS 0.35 8
2012 ams C35B4M3 CMOS RF 0.35 2
2012 ams S35B4M3 SiGe BiCMOS 0.35 4
2012 ams H35B4D3 High Voltage 0.5 5
2012 ams CXQ CMOS 0.8 1
2012 MEMSCAP SOIMUMPS MEMS N/A 1
2012 STMicroelectronics CMOS130 CMOS130 130 nm 4
2012 STMicroelectronics HCMOS9-SOI CMOS SOI 130 nm 1
2012 STMicroelectronics BiCMOS9MW SiGe BiCMOS 130 nm 4
2012 STMicroelectronics CMOS028LP CMOS028 28 nm 3
2012 STMicroelectronics CMOS040LP CMOS040 40 nm 2
2012 STMicroelectronics CMOS065 CMOS065 65 nm 3
2011 ams C35B4C3-C35B4O1 CMOS 0.35 9
2011 ams C35B4M3 CMOS RF 0.35 2
2011 ams S35B4M3 SiGe BiCMOS 0.35 4
2011 ams H35B4D3 High Voltage 0.35 4
2011 ams CUP CMOS 0.6 1
2011 STMicroelectronics CMOS130 CMOS130 130 nm 4
2011 STMicroelectronics CMOS130-SOI CMOS SOI 130 nm 2
2011 STMicroelectronics BiCMOS9MW SiGe BiCMOS 130nm 3
2011 STMicroelectronics CMOS028LP CMOS028 28 nm 1
2011 STMicroelectronics CMOS040LP CMOS040 40 nm 1
2011 STMicroelectronics CMOS065 CMOS065 65 nm 3
2011 STMicroelectronics CMOS065-SOI CMOS SOI 65 nm 1
2011 TEZZARON 3D-IC FaStack FaStack 130 nm 1
2010 ams C35B4C3/C35B4O1 CMOS 0.35 7
2010 ams C35B4M3 CMOS RF 0.35 4
2010 ams S35B4M3 SiGe BiCMOS 0.35 5
2010 ams H35B4D3 High Voltage 0.35 4
2010 STMicroelectronics CMOS130 CMOS130 130 nm 5
2010 STMicroelectronics BiCMOS9MW BiCMOS9MW 130 nm 6
2010 STMicroelectronics CMOS065 CMOS065 65 nm 3
2010 STMicroelectronics CMOS065-SOI CMOS065-SOI 65 nm 1
2010 MEMSCAP PolyMUMPS MEMS N/A 3
2010 MEMSCAP SOIMUMPS MEMS N/A 3
2010 MEMSCAP MetalMUMPS MEMS N/A 2
2009 ams C35B4C3 / C35B4O1 CMOS 0.35 7
2009 ams C35B4M3 CMOS RF 0.35 1
2009 ams S35B4M3 SiGe CMOS 0.35 4
2009 ams H35B4D3 CMOS High Volt. 0.35 4
2009 STMicroelectronics CMOS130 CMOS 130nm 4
2009 STMicroelectronics BiCMOS9MW SiGe BiCMOS 130nm 4
2009 STMicroelectronics CMOS065 CMOS 65nm 6
2009 STMicroelectronics CMOS065-SOI CMOS SOI 65nm 1
2009 STMicroelectronics CMOS090 CMOS N/A 2
2009 MEMSCAP PolyMUMPS MEMS N/A 4
2009 MEMSCAP SOIMUMPS MEMS N/A 3
2009 MEMSCAP MetalMUMPS MEMS N/A 1
2008 ams C35B4C3 / C35B4O1 CMOS 0.35 12
2008 ams C35B4M3 CMOS RF 0.35 3
2008 ams S35D4M5 SiGe BiCMOS 0.35 4
2008 ams H35B4D3 CMOS High Volt. 0.35 3
2008 STMicroelectronics CMOS090 CMOS 90nm 5
2008 STMicroelectronics CMOS130 CMOS 130nm 4
2008 STMicroelectronics BiCMOS7RF SiGe:C BiCMOS 0.25 3
2008 STMicroelectronics CMOS45 CMOS 45nm 2
2008 STMicroelectronics CMOS65 CMOS 65nm 6
2008 MEMSCAP PolyMUMPS MEMS NA 3
2008 MEMSCAP SOIMUMPS MEMS NA 3
2008 MEMSCAP MetalMUMPS MEMS NA 2
2008 OMMIC ED02AH HEMT GaAs 0.2 1
2007 ams BYE/BYQ BiCMOS 0.8 3
2007 ams C35B4C3 / C35B3O1 CMOS 0.35 8
2007 ams C35B4M3 CMOS RF 0.35 1
2007 ams S35D4 SiGe BiCMOS 0.35 4
2007 ams H35B4D3 CMOS High Volt. 0.35 4
2007 STMicroelectronics HCMOS9 CMOS 0.12 9
2007 STMicroelectronics CMOS090 CMOS 90 nm 4
2007 STMicroelectronics CMOS065 CMOS 65 nm 5
2007 STMicroelectronics BiCMOS7RF SiGe:C BiCMOS 0.25 3
2007 OMMIC ED02AH HEMT GaAs 0.2 2
2007 CSMC CSMC 0.6 CMOS CMOS 0.6 1
2007 MEMSCAP MetalMUMPS MEMS NA 2
2007 MEMSCAP PolyMUMPS MEMS NA 4
2006 ams C35B4C3 / C35B3O1 CMOS 0.35 10
2006 ams C35B4M3 CMOS RF 0.35 3
2006 ams H35B4D3 CMOS High Volt. 0.35 3
2006 ams S35D4 SiGe BiCMOS 0.35 4
2006 ams CUP CMOS 0.6 1
2006 STMicroelectronics HCMOS9 CMOS 0.12 5
2006 STMicroelectronics CMOS090 CMOS 90 nm 5
2006 STMicroelectronics BiCMOS7RF SiGe:C BiCMOS 0.25 2
2006 STMicroelectronics CMOS065 CMOS 65 nm 1
2006 OMMIC ED02AH HEMT GaAs 0.2 1
2006 MOSIS/IBM 6RF CMOS 0.25 1
2006 CSMC CSMC 0.6 CMOS CMOS 0.6 1
2006 MEMSCAP MetalMUMPS MEMS NA 2
2006 MEMSCAP PolyMUMPS MEMS NA 2
2006 MEMSCAP SOIMUMPS MEMS NA 1
2005 ams BYE/BYQ BiCMOS 0.8 1
2005 ams CUP CMOS 0.6 3
2005 ams C35B4C3 / C35B3O1 CMOS 0.35 9
2005 ams C35B4M3 CMOS RF 0.35 2
2005 ams S35D4 SiGe BiCMOS 0.35 5
2005 STMicroelectronics HCMOS8 CMOS 0.18 1
2005 STMicroelectronics HCMOS9 CMOS 0.12 7
2005 STMicroelectronics CMOS090 CMOS 90 nm 6
2005 STMicroelectronics BiCMOS6G SiGe BiCMOS 0.35 1
2005 STMicroelectronics BiCMOS7RF SiGe:C BiCMOS 0.25 1
2005 OMMIC ED02AH HEMT GaAs 0.2 2
2005 MEMSCAP PolyMUMPS MEMS NA 2
2004 ams CYE CMOS 0.8 5
2004 ams BYE/BYQ BiCMOS 0.8 3
2004 ams CUP CMOS 0.6 5
2004 ams C35B4C3 / C35B3O1 CMOS 0.35 5
2004 ams C35B4M3 CMOS RF 0.35 1
2004 ams S35D4 SiGe BiCMOS 0.35 4
2004 STMicroelectronics HCMOS8 CMOS 0.18 2
2004 STMicroelectronics HCMOS9 CMOS 0.12 5
2004 STMicroelectronics BiCMOS6G SiGe BiCMOS 0.35 2
2004 OMMIC ED02AH HEMT GaAs 0.2 2
2004 MEMSCAP PolyMUMPS MEMS NA 3
2003 ams CBK CMOS High Volt. 2 1
2003 ams CYE CMOS 0.8 4
2003 ams BYE/BYQ BiCMOS 0.8 7
2003 ams BYR SiGe BiCMOS 0.8 1
2003 ams CUP CMOS 0.6 6
2003 ams CSI CMOS 0.35 6
2003 ams B35D4 BiCMOS 0.35 1
2003 ams S35D4 SiGe BiCMOS 0.35 1
2003 STMicroelectronics HCMOS8 CMOS 0.18 5
2003 STMicroelectronics HCMOS9 CMOS 0.12 1
2003 STMicroelectronics BiCMOS6G SiGe BiCMOS 0.35 2
2003 OMMIC ED02AH HEMT GaAs 0.2 2
2003 PEREGRINE FC SOS CMOS 0.5 1
2003 MEMSCAP PolyMUMPS MEMS NA 2
2003 MEMSCAP SOIMUMPS MEMS NA 1
2002 ams CBK CMOS High Volt. 2 1
2002 ams CYE CMOS 0.8 5
2002 ams CUP CMOS 0.6 8
2002 ams CSI CMOS 0.35 6
2002 ams BYE/BYQ BiCMOS 0.8 7
2002 ams BYR SiGe BiCMOS 0.8 6
2002 STMicroelectronics HCMOS8 CMOS 0.18 7
2002 STMicroelectronics BiCMOS6G SiGe BiCMOS 0.35 3
2002 OMMIC ED02AH HEMT GaAs 0.2 1
2002 PEREGRINE FC SOS CMOS 0.5 1
2001 ams CSI CMOS 0.35 5
2001 ams CUP CMOS 0.6 8
2001 ams BYE/BYQ BiCMOS 0.8 7
2001 ams CYE CMOS 0.8 5
2001 ams BYR SiGe BiCMOS 0.8 6
2001 CRONOS MUMPs Surf. Micromac. 2 2
2001 PEREGRINE FC SOS CMOS 0.5 2
2001 OMMIC ED02AH HEMT GaAs 0.2 2
2001 STMicroelectronics HCMOS8 CMOS 0.18 5
2001 STMicroelectronics HCMOS7 CMOS 0.25 4
2000 ams CYE CMOS 0.8 4
2000 ams CXQ CMOS 0.8 1
2000 ams CUP CMOS 0.6 5
2000 ams CSI CMOS 0.35 4
2000 ams BAE BiCMOS 1.2 1
2000 ams BYE/BYQ BiCMOS 0.8 7
2000 ams BYR SiGe BiCMOS 0.8 6
2000 STMicroelectronics HCMOS7 CMOS 0.25 8
2000 STMicroelectronics HCMOS8 CMOS 0.18 1
2000 OMMIC ED02AH HEMT GaAs 0.2 2
2000 CRONOS MUMPs Surf. Micromac. 2 3
2000 OMMIC ED02AH HEMT GaAs 0.2 2
2000 CRONOS MUMPs Surf. Micromac. 2 3
1999 ams CAE CMOS 1.2 3
1999 ams CYE CMOS 0.8 7
1999 ams CUP CMOS 0.6 7
1999 ams CSD CMOS 0.35 2
1999 ams BYE BiCMOS 0.8 4
1999 ams BYQ HBT CMOS 0.8 2
1999 PML HCMOS7 CMOS 0.25 3
1999 PML ED02AH HEMT GaAs 0.2 3
1999 CRONOS MUMPs Surf. Micromach. 0.2 3
1998 ATMEL ES2 ECPD07 CMOS 0.7 3
1998 ams CAE CMOS 1.2 5
1998 ams CYE CMOS 0.8 4
1998 ams CUE/CX06AA CMOS 0.6 5
1998 ams BAE BiCMOS 1.2 3
1998 ams BYE/BYQ BiCMOS 0.8 6
1998 VSC HGaAs-IV Dig. GaAs 0.5 1
1998 PML D02AH HEMT GaAs 0.2 2
1998 STMicroelectronics HCMOS7 CMOS 0.25 2
1998 CRONOS MUMPs Surf. Micromach. 2 3
1997 ATMEL ES2 ECPD07 CMOS 0.7 11
1997 ams BAE BiCMOS 1.2 3
1997 ams BYE BiCMOS 0.8 8
1997 ams CAE CMOS 1.2 6
1997 ams CYE CMOS 0.8 9
1997 ams CUE CMOS 0.6 2
1997 VSC HGaAs-3 Dig. GaAs 0.6 3
1997 PML D02AH HEMT GaAs 0.2 2
1996 ams BAE BiCMOS 1.2 5
1996 ams BYE BiCMOS 0.8 4
1996 ams CAE CMOS 1.2 6
1996 ams CYE CMOS 0.8 4
1996 ATMEL ES2 ECPD07 CMOS 0.7 8
1996 ATMEL ES2 ECPD10 CMOS 1.0 9
1996 ATMEL ES2 ECPD12 CMOS 1.2 1
1996 PML D02AH HEMT GaAs 0.2 2
1996 TCS Polyuse L12 Bipolar - 1
1996 VSC HGaAs-3 Dig. GaAs 0.6 3
1995 ams BAE BiCMOS 1.2 4
1995 ams BYE BiCMOS 0.8 2
1995 ams CAE CMOS 1.2 5
1995 ams CYE CMOS 0.8 4
1995 ATMEL ES2 ECPD07 CMOS 0.7 4
1995 ATMEL ES2 ECPD10 CMOS 1.0 6
1995 ATMEL ES2 ECPD12 CMOS 1.2 2
1995 PML D02AH HEMT GaAs 0.2 2
1995 TCS Polyuse L12 Bipolar - 2
1995 VSC HgaAs-3 Dig. GaAs 0.6 3
1994 ams BAE BiCMOS 1.2 3
1994 ams CAE CMOS 1.2 6
1994 ams CYB CMOS 0.8 3
1994 ES2 ECPD07 CMOS 0.7 1
1994 ES2 ECPD10 CMOS 1.0 5
1994 ES2 ECPD12 CMOS 1.2 4
1994 ES2 ECPD15 CMOS 1.5 3
1994 STM HCMOS5 CMOS 0.5 1
1994 TCS Polyuse L12 Bipolar - 4
1994 VSC HgaAs-II Dig. GaAs 0.8 1
1994 VSC HgaAs-3 Dig. GaAs 0.6 1
1993 ams BAB/CAE BiCMOS 1.2 1
1993 ams CAE CMOS 1.2 6
1993 ams CBE CMOS 2 1
1993 ES2 ECPD10 CMOS 1.0 2
1993 ES2 ECPD12 CMOS 1.2 5
1993 ES2 ECPD15 CMOS 1.5 4
1993 TCS HgaAsII Dig. GaAs 0.8 3
1993 TCS Polyuse L12 Bipolar - 3
1992 ams CAE CMOS 1.2 4
1992 ams CBE CMOS 2 5
1992 ES2 ECPD12 CMOS 1.2 5
1992 ES2 ECPD15 CMOS 1.5 6
1992 TCMS Polyuse L12 Bipolar - 3
1991 ams CBE CMOS 2 3
1991 ES2 ECDM20 CMOS 2 2
1991 ES2 ECPD12 CMOS 1.2 3
1991 ES2 ECPD15 CMOS 1.5 4
1991 TCMS Polyuse L12 Bipolar - 2
1990 ES2 ECDM20 CMOS 2 5
1990 ES2 ECPD15 CMOS 1.5 3
1990 TCMS Polyuse L12 Bipolar - 1
1989 ES2 ECDM20 CMOS 2 5
1988 ES2 ECDM20 CMOS 2 4
1987 ES2 ECDM20 CMOS 2 3
1987 MHS CMOS/Saj5 CMOS 2 1
1986 MHS CMOS/Saj5 CMOS 2 1
1986 THOMS NMOS/hm1 NMOS 3.5 1
1985 MHS CMOS/Saj5 CMOS 2 1
1985 THOMS NMOS/hm1 NMOS 3.5 1
1984 CNET NMOS/L3 NMOS 3.15 2
1984 MHS CMOS/Saj4 CMOS 3.5 1
1983 CNET NMOS/L3 NMOS 3.15 1
1982 CNET NMOS/NC NMOS 4.5 1
1981 UCL UCL NMOS 8 1

Key dates

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2015 55nm BiCMOS055, STMicroelectronics
2014 130nm SOI FEM ST / Bulk micromachining ams / DALSA MEMS / PiezoMUMPS
2013 Analog 130nm H9A CMOS, THELMA MEMS, STMicroelectronics
2012 28 nm FD-SOI, STMicroelectronics, 0.18µ CMOS/HV-CMOS, ams
2011 150 nm GaAs pHEMT, TRIQUINT, 180nm CMOS CIS, TOWERJAZZ, 28 nm CMOS, STMicroelectronics
2010 130 nm 3D-IC, TEZZARON / GLOBALFOUNDRIES
2010 20 nm FDSOI, LETI – CEA
2009 40 nm CMOS
2008 45 nm CMOS, 65 nm SOI
2006 65 nm CMOS
2005 ASIMPS, SUMMIT/SANDIA
2004 90 nm CMOS
2003 130 nm CMOS
2003 PolyMUMPS, MetalMUMPS, SOIMUMPS
2001 .35 µm HBT SiGe BiCMOS
1999 Launching SiGe, .18 µm CMOS
1998 Launching surface micromachined MEMS, abandon MESFET GaAs
1995–1997 Launching CMOS, BiCMOS and GaAs compatible MEMS, DOEs, deep-submicron CMOS (.25 µm 6LM)
1990–1994 Launching Bipolar, BiCMOS, MESFET GaAs, HEMT GaAs, advanced CMOS (.5 µm TLM)
1987–1989 Abandon NMOS, increase the frequency of CMOS runs
1984–1986 Development of CMOS
1983–1984 Development of NMOS, launching CMOS
1981–1982 Launching CMP with NMOS