Logo DTIP
Rome, Italy
1-3 April 2009
SYMPOSIUM on

Design, Test, Integration
& Packaging of MEMS/MOEMS
collage

Special session on 3D Integration of MEMS

The Special session on 3D Integration of MEMS puts together papers on demand for 3D-Integration, design support from the application point of view, 3D Integration technologies enabling stacking of MEMS, as well as application examples from different areas.

This special session is organized by Peter SCHNEIDER, Fraunhofer IIS/EAS, Dresden, Germany