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Plenary invited speakers

Christian A. ZORMAN, Case Western Reserve University, Cleveland, Ohio, USA

Silicon Carbide as a material for biomedical microsystems

Silicon Carbide (SiC) is emerging as an enabling material for biomedical microsystems due to its unique combination of electrical, mechanical and chemical properties. This talk will review the latest advancements in this area including on-going research to develop SiC thin films for bio-microdevice packaging, bio-filtering, biomedical imaging and other related applications.

Michel BRILLOUET, CEA/LETI, Grenoble, France

NEMS: The challenge of combining Microsystems and nanotechnology for new market opportunities

Moving from micrometer-scale microsystems to nanometer sized devices gives exciting new perspectives from a laboratory perspective: it is not just a matter of extending MEMS concepts to a smaller scale, but, owing to phenomena arising at these dimensions, the approach for designing new sensors has to be revisited. Potential technical breakthroughs will be first discussed. However the onset of new applications didn't materialize yet in the daily life: reasons for that and the way out towards emerging markets will be considered.