Fixed die size: 1cm x 1cm
Polysilicon Surface Micomachining. One poly ground layer, two structural poly layers, one gold metal layer, two oxide release layers.
MEMS, micromechanics, MOEMS.
1, MEMS Pro v7.0
Cadence IC 6.1.5 Cadence IC 5.1.41 SoftMEMS: Datasheet Softmems_filesmpv70_ds_hq.
Calibre (Mentor Graphics)
CaMEL (Consolidated Micromechanical Element Library: http://www.memscap.com/memsrus/svcscml.html). CaMEL contains a non-parameterized cell database and a parameterized MEMS element library, for use by both the novice and advanced MEMS designers. Both libraries are intended to assist users in the design and layout of MEMS devices by providing an initial layout for components of a MEMS system.
Typical: 10 weeks (from GDS2 tape to packaged parts)