Technical developments offered by CMP
The following tables summarize the history of CMP projects since 1981.

Since 1981, 614 customers from 70 countries have been served, more than 7900 projects have been prototyped through 1043 runs and 72 different technologies have been interfaced.
Here below some history data, firstly the history of CMP runs in the Year-1 and then history of CMP runs from 1981 to the Year-1.
History of CMP runs in 2017
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Foundry | Technology | Run | Institution | Educational | Research | Industrial | Total circuits |
---|---|---|---|---|---|---|---|
Foundry | Technology | Run | Inst. | Edu | Res | Ind | Total cir |
IRT Nanoelec/LETI-CEA | Si310-PHMP2M | L13F17_2 | 1 | 0 | 0 | 1 | 1 |
ams | 0.18µm CMOS High Voltage H18A6 | A18V17_1 | 3 | 0 | 3 | 0 | 3 |
ams | 0.18µm CMOS High Voltage H18A6 | A18V17_2 | 3 | 1 | 2 | 0 | 3 |
ams | 0.18µm CMOS High Voltage H18A6 | A18V17_3 | 2 | 0 | 2 | 0 | 2 |
ams | 0.18µm CMOS High Voltage H18A6 | A18V17_4 | 1 | 0 | 0 | 1 | 1 |
ams | 0.35µm CMOS C35B4C3 | A35C16_2 | 1 | 0 | 0 | 1 | 1 |
ams | 0.35µm CMOS C35B4C3 | A35C17_1 | 4 | 0 | 3 | 1 | 4 |
ams | 0.35µm CMOS C35B4C3 | A35C17_2 | 6 | 0 | 3 | 3 | 6 |
ams | 0.35µm CMOS C35B4C4 | A35C17_3 | 4 | 0 | 3 | 2 | 5 |
ams | 0.35µm CMOS C35B4C5 | A35C17_4 | 3 | 0 | 2 | 1 | 3 |
ams | 0.35µm CMOS C35B4C6 | A35C17_5 | 3 | 0 | 2 | 2 | 4 |
ams | 0.35µm CMOS C35B4C7 | A35C17_6 | 2 | 0 | 2 | 0 | 2 |
ams | 0.35µm CMOS C35B4C8 | SA35C17_1 | 1 | 0 | 0 | 1 | 1 |
ams | 0.35µm CMOS C35B4C9 | SA35C17_2 | 1 | 0 | 0 | 1 | 1 |
ams | 0.35µm CMOS C35B4C10 | SA35C17_3 | 1 | 0 | 1 | 0 | 1 |
ams | 0.35µm MEMS Bulk | A35C17_4-MEMS | 2 | 0 | 2 | 0 | 2 |
ams | 0.35µm CMOS-Opto C35B4O1 | A35O17_1 | 2 | 0 | 2 | 1 | 3 |
ams | 0.35µm CMOS-Opto C35B4O1 | A35O17_3 | 2 | 0 | 2 | 0 | 2 |
ams | 0.35µm CMOS-Opto C35B4O1 | A35O17_4 | 3 | 0 | 2 | 1 | 3 |
ams | 0.35µm CMOS-Opto C35B4O1 | A35O17_6 | 1 | 0 | 2 | 0 | 2 |
ams | 0.35µm CMOS RF C35B4M3 | A35R17_1 | 3 | 0 | 3 | 0 | 3 |
ams | 0.35µm CMOS RF C35B4M3 | A35S17_3 | 2 | 0 | 2 | 0 | 2 |
ams | 0.35µm CMOS RF C35B4M3 | A35R17_3 | 2 | 0 | 2 | 0 | 2 |
ams | 0.35µm SiGe BiCMOS S35D4M5 | A35S17_4 | 1 | 0 | 1 | 0 | 1 |
ams | 0.35µm SiGe BiCMOS S35D4M5 | SA35S17_1 | 1 | 0 | 0 | 1 | 1 |
ams | 0.35µm CMOS High Voltage H35B4D3 | A35V17_1 3 | 0 | 2 | 1 | 3 | |
ams | 0.35µm CMOS High Voltage H35B4D3 | A35V17_2 1 | 0 | 1 | 0 | 1 | |
ams | 0.35µm CMOS High Voltage H35B4D3 | A35V17_3 | 2 | 0 | 2 | 0 | 2 |
ams | 0.35µm CMOS High Voltage H35B4D3 | A35V17_4 3 | 0 | 2 | 1 | 3 | |
ams | 0.35µm CMOS High Voltage H35B4D3 | SA35V12_2 3 | 0 | 0 | 3 | 3 | |
STMicroelectronics | 130nm HCMOS9GP | S13C17_3 | 1 | 0 | 1 | 0 | 1 |
STMicroelectronics | 130nm H9SOI-FEM | S13I17_1 | 1 | 0 | 0 | 2 | 2 |
STMicroelectronics | 130nm H9SOI-FEM | S13I17_3 | 3 | 0 | 2 | 1 | 3 |
STMicroelectronics | 130 nm SiGe BiCMOS9MW | S13S15_4 | 1 | 0 | 0 | 1 | 1 |
STMicroelectronics | 130 nm SiGe BiCMOS9MW | S13S17_1 | 5 | 0 | 6 | 2 | 8 |
STMicroelectronics | 130 nm SiGe BiCMOS9MW | S13S17_2 | 4 | 0 | 2 | 6 | 8 |
STMicroelectronics | 130 nm SiGe BiCMOS9MW | S13S17_3 | 1 | 0 | 1 | 0 | 1 |
STMicroelectronics | 130 nm SiGe BiCMOS9MW | SS13S17_1 | 1 | 0 | 0 | 11 | 11 |
STMicroelectronics | 130 nm H9A1711 MADII HCMOS9A | SS13V17_1 | 8 | 0 | 9 | 3 | 12 |
STMicroelectronics | 28 nm CMOS28FDSOI | S28I17_1 | 7 | 0 | 6 | 4 | 10 |
STMicroelectronics | 28 nm CMOS28FDSOI | S28I17_2 | 13 | 0 | 15 | 3 | 18 |
STMicroelectronics | 28 nm CMOS28FDSOI | S28I17_4 5 | 0 | 6 | 1 | 7 | |
STMicroelectronics | 55 nm BiCMOS055 | S55S17_1 | 2 | 0 | 3 | 0 | 3 |
STMicroelectronics | 55 nm BiCMOS055 | S55S17_2 | 4 | 0 | 5 | 2 | 7 |
STMicroelectronics | 55 nm BiCMOS055 | S55S17_3 | 3 | 0 | 7 | 0 | 7 |
STMicroelectronics | 65 nm CMOS065 | S65C16_2 | 1 | 0 | 1 | 0 | 1 |
STMicroelectronics | 65 nm CMOS065 | S65C17_1 | 8 | 0 | 13 | 2 | 15 |
STMicroelectronics | 65 nm CMOS065 | S65C17_3 | 13 | 0 | 13 | 2 | 15 |
48 runs | 138 | 62 | 201 |
History of CMP projects since 1981
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36 years | 21 foundries | 71 technologies | 11 types | 1022 runs | |
2016 | IBM | T92B | 1 | ||
2016 | ams | H18A6 | High Voltage | 0.18 | 4 |
2016 | ams | CA18A6 | CMOS | 0.18 | 1 |
2016 | ams | C35B4C3 | CMOS | 0.35 | 4 |
2016 | ams | C35B4O1 | CMOS-Opto | 0.35 | 1 |
2016 | ams | C35B4M3 | CMOS RF | 0.35 | 3 |
2016 | ams | S35B4M3 | SiGe BiCMOS | 0.35 | 1 |
2016 | ams | H35B4D3 | High Voltage | 0.35 | 3 |
2016 | STMicroelectronics | CMOS130 | HCMOS9GP | 130nm | 3 |
2016 | STMicroelectronics | HCMOS9-SOI | H9SOI-FEM | 130nm | 3 |
2016 | STMicroelectronics | BiCMOS9MW | SiGe BiCMOS9MW | 130nm | 3 |
2016 | STMicroelectronics | CMOS28FDSOI | CMOS28FDSOI | 28nm | 3 |
2016 | STMicroelectronics | BiCMOS55 | BiCMOS055 | 55nm | 2 |
2016 | STMicroelectronics | CMOS065 | CMOS065 | 65nm | 2 |
2015 | ams | H18A6 | CMOS High Voltage | 0.18 | 3 |
2015 | ams | CA18A6 | CMOS | 0.35 | 3 |
2015 | ams | C35B4C3 | CMOS | 0.35 | 4 |
2015 | ams | C35B4O1 | CMOS-Opto ARC | 0.35 | 2 |
2015 | ams | C35B4M3 | CMOS RF | 0.35 | 2 |
2015 | ams | S35B4M3 | BiCMOS SiGe | 0.35 | 4 |
2015 | ams | H35B4D3 | CMOS High Voltage | 0.35 | 3 |
2015 | MEMSCAP | MEMS | PiezoMUMPS | N/A | 1 |
2015 | STMicroelectronics | HCMOS9GP | CMOS | 130nm | 3 |
2015 | STMicroelectronics | H9SOI-FEM | Advanced CMOS | 130nm | 2 |
2015 | STMicroelectronics | BiCMOS9MW | BiCMOS SiGe | 130nm | 3 |
2015 | STMicroelectronics | HCMOS9A | CMOS High Voltage | 130nm | 1 |
2015 | STMicroelectronics | CMOS28FDSOI | Advanced CMOS FDSOI | 28nm | 3 |
2015 | STMicroelectronics | BiCMOS55 | BiCMOS SiGe | 55nm | 2 |
2015 | STMicroelectronics | CMOS065 | CMOS | 65nm | 3 |
2014 | ams | H18A6 | CMOS High Voltage | 0.18 | 2 |
2014 | ams | C35B4C3-C35B4O1 | CMOS | 0.35 | 5 |
2014 | ams | C35B4M3 | CMOS RF | 0.35 | 2 |
2014 | ams | S35B4M3 | BiCMOS SiGe | 0.35 | 2 |
2014 | ams | H35B4D3 | CMOS High Voltage | 0.35 | 4 |
2014 | MEMSCAP | MEMS | PiezoMUMPS | N/A | 1 |
2014 | STMicroelectronics | CMOS130 | CMOS130 | 130nm | 4 |
2014 | STMicroelectronics | HCMOS9-SOI | CMOS SOI | 130nm | 1 |
2014 | STMicroelectronics | BiCMOS9MW | BiCMOS SiGe | 130nm | 3 |
2014 | STMicroelectronics | HCMOS9A HV-CMOS | HCMOS9A | 130nm | 1 |
2014 | STMicroelectronics | CMOS28FDSOI | Advanced CMOS FDSOI | 28nm | 3 |
2014 | STMicroelectronics | BiCMOS55 | BiCMOS | 55nm | 2 |
2014 | STMicroelectronics | CMOS065 | CMOS | 65nm | 2 |
2013 | ams | H18A6 | CMOS High Voltage | 0.18 | 1 |
2013 | ams | C35B4C3-C35B4O1 | CMOS | 0.35 | 9 |
2013 | ams | C35B4M3 | CMOS RF | 0.35 | 2 |
2013 | ams | S35B4M3 | BiCMOS SiGe | 0.35 | 4 |
2013 | ams | H35B4D3 | CMOS High Voltage | 0.35 | 3 |
2013 | ams | CYE | CMOS | 0.8 | 1 |
2013 | TRIQUINT | pHEMT GaAs | pHEMT GaAs TQP15 | 150nm | 1 |
2013 | MEMSCAP | MEMS | PolyMUMPS | N/A | 1 |
2013 | MEMSCAP | MEMS | SOIMUMPS | N/A | 2 |
2013 | STMicroelectronics | CMOS130 | CMOS | 130nm | 4 |
2013 | STMicroelectronics | HCMOS9-SOI | CMOS SOI | 130nm | 4 |
2013 | STMicroelectronics | BiCMOS9MW | BiCMOS SiGe | 130nm | 4 |
2013 | STMicroelectronics | HCMOS9A | HCMOS9A | 130nm | 1 |
2013 | STMicroelectronics | CMOS028LP | CMOS028 | 28nm | 2 |
2013 | STMicroelectronics | CMOS28FDSOI | Advanced CMOS FDSOI | 28nm | 3 |
2013 | STMicroelectronics | BICMOS55 | BiCMOS | 55nm | 2 |
2013 | STMicroelectronics | CMOS065 | CMOS065 | 65nm | 4 |
2012 | ams | C35B4C3-C35B4O1 | CMOS | 0.35 | 8 |
2012 | ams | C35B4M3 | CMOS RF | 0.35 | 2 |
2012 | ams | S35B4M3 | BiCMOS SiGe | 0.35 | 4 |
2012 | ams | H35B4D3 | High Voltage | 0.5 | 5 |
2012 | ams | CXQ | CMOS | 0.8 | 1 |
2012 | MEMSCAP | SOIMUMPS | MEMS | N/A | 1 |
2012 | STMicroelectronics | CMOS130 | CMOS130 | 130 nm | 4 |
2012 | STMicroelectronics | HCMOS9-SOI | CMOS SOI | 130 nm | 1 |
2012 | STMicroelectronics | BiCMOS9MW | BiCMOS SiGe | 130 nm | 4 |
2012 | STMicroelectronics | CMOS028LP | CMOS028 | 28 nm | 3 |
2012 | STMicroelectronics | CMOS040LP | CMOS040 | 40 nm | 2 |
2012 | STMicroelectronics | CMOS065 | CMOS065 | 65 nm | 3 |
2011 | ams | C35B4C3-C35B4O1 | CMOS | 0.35 | 9 |
2011 | ams | C35B4M3 | CMOS RF | 0.35 | 2 |
2011 | ams | S35B4M3 | BiCMOS SiGe | 0.35 | 4 |
2011 | ams | H35B4D3 | CMOS High Voltage | 0.35 | 4 |
2011 | ams | CUP | CMOS | 0.6 | 1 |
2011 | STMicroelectronics | CMOS130 | CMOS | 130 nm | 4 |
2011 | STMicroelectronics | CMOS130-SOI | CMOS SOI | 130 nm | 2 |
2011 | STMicroelectronics | BiCMOS9MW | BiCMOS SiGe | 130nm | 3 |
2011 | STMicroelectronics | CMOS028LP | CMOS0 | 28 nm | 1 |
2011 | STMicroelectronics | CMOS040LP | CMOS0 | 40 nm | 1 |
2011 | STMicroelectronics | CMOS065 | CMOS0 | 65 nm | 3 |
2011 | STMicroelectronics | CMOS065-SOI | CMOS SOI | 65 nm | 1 |
2011 | TEZZARON | 3D-IC FaStack | FaStack | 130 nm | 1 |
2010 | ams | C35B4C3/C35B4O1 | CMOS | 0.35 | 7 |
2010 | ams | C35B4M3 | CMOS RF | 0.35 | 4 |
2010 | ams | S35B4M3 | BiCMOS SiGe | 0.35 | 5 |
2010 | ams | H35B4D3 | CMOS High Voltage | 0.35 | 4 |
2010 | STMicroelectronics | CMOS130 | CMOS | 130 nm | 5 |
2010 | STMicroelectronics | BiCMOS9MW | BiCMOS | 130 nm | 6 |
2010 | STMicroelectronics | CMOS065 | CMOS0 | 65 nm | 3 |
2010 | STMicroelectronics | CMOS065-SOI | CMOS065-SOI | 65 nm | 1 |
2010 | MEMSCAP | MEMS | PolyMUMPS | N/A | 3 |
2010 | MEMSCAP | MEMS | SOIMUMPS | N/A | 3 |
2010 | MEMSCAP | MEMS | MetalMUMPS | N/A | 2 |
2009 | ams | C35B4C3 / C35B4O1 | CMOS | 0.35 | 7 |
2009 | ams | C35B4M3 | CMOS RF | 0.35 | 1 |
2009 | ams | S35B4M3 | BiCMOS SiGe | 0.35 | 4 |
2009 | ams | H35B4D3 | CMOS High Volt. | 0.35 | 4 |
2009 | STMicroelectronics | CMOS130 | CMOS | 130nm | 4 |
2009 | STMicroelectronics | BiCMOS9MW | BiCMOS SiGe | 130nm | 4 |
2009 | STMicroelectronics | CMOS065 | CMOS | 65nm | 6 |
2009 | STMicroelectronics | CMOS065-SOI | CMOS SOI | 65nm | 1 |
2009 | STMicroelectronics | CMOS090 | CMOS | N/A | 2 |
2009 | MEMSCAP | MEMS PolyMUMPS | N/A | 4 | |
2009 | MEMSCAP | MEMS | SOIMUMPS | N/A | 3 |
2009 | MEMSCAP | MEMS | MetalMUMPS | N/A | 1 |
2008 | ams | C35B4C3 / C35B4O1 | CMOS | 0.35 | 12 |
2008 | ams | C35B4M3 | CMOS RF | 0.35 | 3 |
2008 | ams | S35D4M5 | BiCMOS SiGe | 0.35 | 4 |
2008 | ams | H35B4D3 | CMOS High Volt. | 0.35 | 3 |
2008 | STMicroelectronics | CMOS090 | CMOS | 90nm | 5 |
2008 | STMicroelectronics | CMOS130 | CMOS | 130nm | 4 |
2008 | STMicroelectronics | BiCMOS7RF | SiGe:C BiCMOS | 0.25 | 3 |
2008 | STMicroelectronics | CMOS45 | CMOS | 45nm | 2 |
2008 | STMicroelectronics | CMOS65 | CMOS | 65nm | 6 |
2008 | MEMSCAP | MEMS | PolyMUMPS | NA | 3 |
2008 | MEMSCAP | MEMS | SOIMUMPS | NA | 3 |
2008 | MEMSCAP | MEMS | MetalMUMPS | NA | 2 |
2008 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 1 |
2007 | ams | BYE/BYQ | BiCMOS | 0.8 | 3 |
2007 | ams | C35B4C3 / C35B3O1 | CMOS | 0.35 | 8 |
2007 | ams | C35B4M3 | CMOS RF | 0.35 | 1 |
2007 | ams | S35D4 | SiGe BiCMOS | 0.35 | 4 |
2007 | ams | H35B4D3 | CMOS High Volt. | 0.35 | 4 |
2007 | STMicroelectronics | HCMOS9 | CMOS | 0.12 | 9 |
2007 | STMicroelectronics | CMOS090 | CMOS | 90 nm | 4 |
2007 | STMicroelectronics | CMOS065 | CMOS | 65 nm | 5 |
2007 | STMicroelectronics | BiCMOS7RF | SiGe:C BiCMOS | 0.25 | 3 |
2007 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 2 |
2007 | CSMC | CSMC 0.6 CMOS | CMOS | 0.6 | 1 |
2007 | MEMSCAP | MetalMUMPS | MEMS | NA | 2 |
2007 | MEMSCAP | PolyMUMPS | MEMS | NA | 4 |
2006 | ams | C35B4C3 / C35B3O1 | CMOS | 0.35 | 10 |
2006 | ams | C35B4M3 | CMOS RF | 0.35 | 3 |
2006 | ams | H35B4D3 | CMOS High Volt. | 0.35 | 3 |
2006 | ams | S35D4 | SiGe BiCMOS | 0.35 | 4 |
2006 | ams | CUP | CMOS | 0.6 | 1 |
2006 | STMicroelectronics | HCMOS9 | CMOS | 0.12 | 5 |
2006 | STMicroelectronics | CMOS090 | CMOS | 90 nm | 5 |
2006 | STMicroelectronics | BiCMOS7RF | SiGe:C BiCMOS | 0.25 | 2 |
2006 | STMicroelectronics | CMOS065 | CMOS | 65 nm | 1 |
2006 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 1 |
2006 | MOSIS/IBM | 6RF | CMOS | 0.25 | 1 |
2006 | CSMC | CSMC 0.6 CMOS | CMOS | 0.6 | 1 |
2006 | MEMSCAP | MetalMUMPS | MEMS | NA | 2 |
2006 | MEMSCAP | PolyMUMPS | MEMS | NA | 2 |
2006 | MEMSCAP | SOIMUMPS | MEMS | NA | 1 |
2005 | ams | BYE/BYQ | BiCMOS | 0.8 | 1 |
2005 | ams | CUP | CMOS | 0.6 | 3 |
2005 | ams | C35B4C3 / C35B3O1 | CMOS | 0.35 | 9 |
2005 | ams | C35B4M3 | CMOS RF | 0.35 | 2 |
2005 | ams | S35D4 | SiGe BiCMOS | 0.35 | 5 |
2005 | STMicroelectronics | HCMOS8 | CMOS | 0.18 | 1 |
2005 | STMicroelectronics | HCMOS9 | CMOS | 0.12 | 7 |
2005 | STMicroelectronics | CMOS090 | CMOS | 90 nm | 6 |
2005 | STMicroelectronics | BiCMOS6G | SiGe BiCMOS | 0.35 | 1 |
2005 | STMicroelectronics | BiCMOS7RF | SiGe:C BiCMOS | 0.25 | 1 |
2005 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 2 |
2005 | MEMSCAP | PolyMUMPS | MEMS | NA | 2 |
2004 | ams | CYE | CMOS | 0.8 | 5 |
2004 | ams | BYE/BYQ | BiCMOS | 0.8 | 3 |
2004 | ams | CUP | CMOS | 0.6 | 5 |
2004 | ams | C35B4C3 / C35B3O1 | CMOS | 0.35 | 5 |
2004 | ams | C35B4M3 | CMOS RF | 0.35 | 1 |
2004 | ams | S35D4 | SiGe BiCMOS | 0.35 | 4 |
2004 | STMicroelectronics | HCMOS8 | CMOS | 0.18 | 2 |
2004 | STMicroelectronics | HCMOS9 | CMOS | 0.12 | 5 |
2004 | STMicroelectronics | BiCMOS6G | SiGe BiCMOS | 0.35 | 2 |
2004 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 2 |
2004 | MEMSCAP | PolyMUMPS | MEMS | NA | 3 |
2003 | ams | CBK | CMOS High Volt. | 2 | 1 |
2003 | ams | CYE | CMOS | 0.8 | 4 |
2003 | ams | BYE/BYQ | BiCMOS | 0.8 | 7 |
2003 | ams | BYR | SiGe BiCMOS | 0.8 | 1 |
2003 | ams | CUP | CMOS | 0.6 | 6 |
2003 | ams | CSI | CMOS | 0.35 | 6 |
2003 | ams | B35D4 | BiCMOS | 0.35 | 1 |
2003 | ams | S35D4 | SiGe BiCMOS | 0.35 | 1 |
2003 | STMicroelectronics | HCMOS8 | CMOS | 0.18 | 5 |
2003 | STMicroelectronics | HCMOS9 | CMOS | 0.12 | 1 |
2003 | STMicroelectronics | BiCMOS6G | SiGe BiCMOS | 0.35 | 2 |
2003 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 2 |
2003 | PEREGRINE | FC | SOS CMOS | 0.5 | 1 |
2003 | MEMSCAP | PolyMUMPS | MEMS | NA | 2 |
2003 | MEMSCAP | SOIMUMPS | MEMS | NA | 1 |
2002 | ams | CBK | CMOS High Volt. | 2 | 1 |
2002 | ams | CYE | CMOS | 0.8 | 5 |
2002 | ams | CUP | CMOS | 0.6 | 8 |
2002 | ams | CSI | CMOS | 0.35 | 6 |
2002 | ams | BYE/BYQ | BiCMOS | 0.8 | 7 |
2002 | ams | BYR | SiGe BiCMOS | 0.8 | 6 |
2002 | STMicroelectronics | HCMOS8 | CMOS | 0.18 | 7 |
2002 | STMicroelectronics | BiCMOS6G | SiGe BiCMOS | 0.35 | 3 |
2002 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 1 |
2002 | PEREGRINE | FC | SOS CMOS | 0.5 | 1 |
2001 | ams | CSI | CMOS | 0.35 | 5 |
2001 | ams | CUP | CMOS | 0.6 | 8 |
2001 | ams | BYE/BYQ | BiCMOS | 0.8 | 7 |
2001 | ams | CYE | CMOS | 0.8 | 5 |
2001 | ams | BYR | SiGe BiCMOS | 0.8 | 6 |
2001 | CRONOS | MUMPs | Surf. Micromac. | 2 | 2 |
2001 | PEREGRINE | FC | SOS CMOS | 0.5 | 2 |
2001 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 2 |
2001 | STMicroelectronics | HCMOS8 | CMOS | 0.18 | 5 |
2001 | STMicroelectronics | HCMOS7 | CMOS | 0.25 | 4 |
2000 | ams | CYE | CMOS | 0.8 | 4 |
2000 | ams | CXQ | CMOS | 0.8 | 1 |
2000 | ams | CUP | CMOS | 0.6 | 5 |
2000 | ams | CSI | CMOS | 0.35 | 4 |
2000 | ams | BAE | BiCMOS | 1.2 | 1 |
2000 | ams | BYE/BYQ | BiCMOS | 0.8 | 7 |
2000 | ams | BYR | SiGe BiCMOS | 0.8 | 6 |
2000 | STMicroelectronics | HCMOS7 | CMOS | 0.25 | 8 |
2000 | STMicroelectronics | HCMOS8 | CMOS | 0.18 | 1 |
2000 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 2 |
2000 | CRONOS | MUMPs | Surf. Micromac. | 2 | 3 |
2000 | OMMIC | ED02AH | HEMT GaAs | 0.2 | 2 |
2000 | CRONOS | MUMPs | Surf. Micromac. | 2 | 3 |
1999 | ams | CAE | CMOS | 1.2 | 3 |
1999 | ams | CYE | CMOS | 0.8 | 7 |
1999 | ams | CUP | CMOS | 0.6 | 7 |
1999 | ams | CSD | CMOS | 0.35 | 2 |
1999 | ams | BYE | BiCMOS | 0.8 | 4 |
1999 | ams | BYQ | HBT CMOS | 0.8 | 2 |
1999 | PML | HCMOS7 | CMOS | 0.25 | 3 |
1999 | PML | ED02AH | HEMT GaAs | 0.2 | 3 |
1999 | CRONOS | MUMPs | Surf. Micromach. | 0.2 | 3 |
1998 | ATMEL ES2 | ECPD07 | CMOS | 0.7 | 3 |
1998 | ams | CAE | CMOS | 1.2 | 5 |
1998 | ams | CYE | CMOS | 0.8 | 4 |
1998 | ams | CUE/CX06AA | CMOS | 0.6 | 5 |
1998 | ams | BAE | BiCMOS | 1.2 | 3 |
1998 | ams | BYE/BYQ | BiCMOS | 0.8 | 6 |
1998 | VSC | HGaAs-IV | Dig. GaAs | 0.5 | 1 |
1998 | PML | D02AH | HEMT GaAs | 0.2 | 2 |
1998 | STMicroelectronics | HCMOS7 | CMOS | 0.25 | 2 |
1998 | CRONOS | MUMPs | Surf. Micromach. | 2 | 3 |
1997 | ATMEL ES2 | ECPD07 | CMOS | 0.7 | 11 |
1997 | ams | BAE | BiCMOS | 1.2 | 3 |
1997 | ams | BYE | BiCMOS | 0.8 | 8 |
1997 | ams | CAE | CMOS | 1.2 | 6 |
1997 | ams | CYE | CMOS | 0.8 | 9 |
1997 | ams | CUE | CMOS | 0.6 | 2 |
1997 | VSC | HGaAs-3 | Dig. GaAs | 0.6 | 3 |
1997 | PML | D02AH | HEMT GaAs | 0.2 | 2 |
1996 | ams | BAE | BiCMOS | 1.2 | 5 |
1996 | ams | BYE | BiCMOS | 0.8 | 4 |
1996 | ams | CAE | CMOS | 1.2 | 6 |
1996 | ams | CYE | CMOS | 0.8 | 4 |
1996 | ATMEL ES2 | ECPD07 | CMOS | 0.7 | 8 |
1996 | ATMEL ES2 | ECPD10 | CMOS | 1.0 | 9 |
1996 | ATMEL ES2 | ECPD12 | CMOS | 1.2 | 1 |
1996 | PML | D02AH | HEMT GaAs | 0.2 | 2 |
1996 | TCS | Polyuse L12 | Bipolar | - | 1 |
1996 | VSC | HGaAs-3 | Dig. GaAs | 0.6 | 3 |
1995 | ams | BAE | BiCMOS | 1.2 | 4 |
1995 | ams | BYE | BiCMOS | 0.8 | 2 |
1995 | ams | CAE | CMOS | 1.2 | 5 |
1995 | ams | CYE | CMOS | 0.8 | 4 |
1995 | ATMEL ES2 | ECPD07 | CMOS | 0.7 | 4 |
1995 | ATMEL ES2 | ECPD10 | CMOS | 1.0 | 6 |
1995 | ATMEL ES2 | ECPD12 | CMOS | 1.2 | 2 |
1995 | PML | D02AH | HEMT GaAs | 0.2 | 2 |
1995 | TCS | Polyuse L12 | Bipolar | - | 2 |
1995 | VSC | HgaAs-3 | Dig. GaAs | 0.6 | 3 |
1994 | ams | BAE | BiCMOS | 1.2 | 3 |
1994 | ams | CAE | CMOS | 1.2 | 6 |
1994 | ams | CYB | CMOS | 0.8 | 3 |
1994 | ES2 | ECPD07 | CMOS | 0.7 | 1 |
1994 | ES2 | ECPD10 | CMOS | 1.0 | 5 |
1994 | ES2 | ECPD12 | CMOS | 1.2 | 4 |
1994 | ES2 | ECPD15 | CMOS | 1.5 | 3 |
1994 | STM | HCMOS5 | CMOS | 0.5 | 1 |
1994 | TCS | Polyuse L12 | Bipolar | - | 4 |
1994 | VSC | HgaAs-II | Dig. GaAs | 0.8 | 1 |
1994 | VSC | HgaAs-3 | Dig. GaAs | 0.6 | 1 |
1993 | ams | BAB/CAE | BiCMOS | 1.2 | 1 |
1993 | ams | CAE | CMOS | 1.2 | 6 |
1993 | ams | CBE | CMOS | 2 | 1 |
1993 | ES2 | ECPD10 | CMOS | 1.0 | 2 |
1993 | ES2 | ECPD12 | CMOS | 1.2 | 5 |
1993 | ES2 | ECPD15 | CMOS | 1.5 | 4 |
1993 | TCS | HgaAsII | Dig. GaAs | 0.8 | 3 |
1993 | TCS | Polyuse L12 | Bipolar | - | 3 |
1992 | ams | CAE | CMOS | 1.2 | 4 |
1992 | ams | CBE | CMOS | 2 | 5 |
1992 | ES2 | ECPD12 | CMOS | 1.2 | 5 |
1992 | ES2 | ECPD15 | CMOS | 1.5 | 6 |
1992 | TCMS | Polyuse L12 | Bipolar | - | 3 |
1991 | ams | CBE | CMOS | 2 | 3 |
1991 | ES2 | ECDM20 | CMOS | 2 | 2 |
1991 | ES2 | ECPD12 | CMOS | 1.2 | 3 |
1991 | ES2 | ECPD15 | CMOS | 1.5 | 4 |
1991 | TCMS | Polyuse L12 | Bipolar | - | 2 |
1990 | ES2 | ECDM20 | CMOS | 2 | 5 |
1990 | ES2 | ECPD15 | CMOS | 1.5 | 3 |
1990 | TCMS | Polyuse L12 | Bipolar | - | 1 |
1989 | ES2 | ECDM20 | CMOS | 2 | 5 |
1988 | ES2 | ECDM20 | CMOS | 2 | 4 |
1987 | ES2 | ECDM20 | CMOS | 2 | 3 |
1987 | MHS | CMOS/Saj5 | CMOS | 2 | 1 |
1986 | MHS | CMOS/Saj5 | CMOS | 2 | 1 |
1986 | THOMS | NMOS/hm1 | NMOS | 3.5 | 1 |
1985 | MHS | CMOS/Saj5 | CMOS | 2 | 1 |
1985 | THOMS | NMOS/hm1 | NMOS | 3.5 | 1 |
1984 | CNET | NMOS/L3 | NMOS | 3.15 | 2 |
1984 | MHS | CMOS/Saj4 | CMOS | 3.5 | 1 |
1983 | CNET | NMOS/L3 | NMOS | 3.15 | 1 |
1982 | CNET | NMOS/NC | NMOS | 4.5 | 1 |
1981 | UCL | UCL | NMOS | 8 | 1 |
Key dates
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2016 | Photonics, Cea-Leti |
2015 | 55nm BiCMOS055, STMicroelectronics |
2014 | 130nm SOI FEM ST / Bulk micromachining ams / DALSA MEMS / PiezoMUMPS |
2013 | Analog 130nm H9A CMOS, THELMA MEMS, STMicroelectronics |
2012 | 28 nm FD-SOI, STMicroelectronics, 0.18µ CMOS/HV-CMOS, ams |
2011 | 150 nm GaAs pHEMT, TRIQUINT, 180nm CMOS CIS, TOWERJAZZ, 28 nm CMOS, STMicroelectronics |
2010 | 130 nm 3D-IC, TEZZARON / GLOBALFOUNDRIES |
2010 | 20 nm FDSOI, LETI – CEA |
2009 | 40 nm CMOS |
2008 | 45 nm CMOS, 65 nm SOI |
2006 | 65 nm CMOS |
2005 | ASIMPS, SUMMIT/SANDIA |
2004 | 90 nm CMOS |
2003 | 130 nm CMOS |
2003 | PolyMUMPS, MetalMUMPS, SOIMUMPS |
2001 | .35 µm HBT SiGe BiCMOS |
1999 | Launching SiGe, .18 µm CMOS |
1998 | Launching surface micromachined MEMS, abandon MESFET GaAs |
1995–1997 | Launching CMOS, BiCMOS and GaAs compatible MEMS, DOEs, deep-submicron CMOS (.25 µm 6LM) |
1990–1994 | Launching Bipolar, BiCMOS, MESFET GaAs, HEMT GaAs, advanced CMOS (.5 µm TLM) |
1987–1989 | Abandon NMOS, increase the frequency of CMOS runs |
1984–1986 | Development of CMOS |
1983–1984 | Development of NMOS, launching CMOS |
1981–1982 | Launching CMP with NMOS |